
skip to main skip to sidebar Pages Home Timeslide View Flipcard February 28, 2012 MIT researchers develop a new approach to producing three-dimensional microchips MIT Microelectromechanical systems , or MEMS , are small devices with huge potential . Typically made of components less than 100 microns in size the diameter of a human hair they have been used as tiny biological sensors , accelerometers , gyroscopes and actuators . Now researchers at MIT have come up with a new approach to MEMS design that enables engineers to design 3-D configurations , using existing fabrication processes with this approach , the researchers built a MEMS device that enables 3-D sensing on a single chip . The silicon device , not much larger than Abraham Lincoln’s ear on a U.S . penny , contains microscopic